PULSED LASER DEPOSITION OF ALUMINUM NITRIDE THIN FILMS ONTO SAPPHIRE SUBSTRATES
PULSED LASER DEPOSITION OF ALUMINUM NITRIDE THIN FILMS ONTO SAPPHIRE SUBSTRATES // Scientific and Technical Journal of Information Technologies, Mechanics and Optics. 2020. DOI: 10.17586/2226-1494-2020-20-2-177-184. S