Relationships between synthesis conditions and TiN coating properties discovered from the data driven approach

Lifar M.S., Guda S.A., Kudryakov O.V., Guda A.A., Pashkov D.M., Rusalev Y.V., Migal Y.F., Soldatov A.V., Kolesnikov V.I. Relationships between synthesis conditions and TiN coating properties discovered from the data driven approach // THIN SOLID FILMS. — 2023.— Vol. 768.0.— P. 139725. — DOI: 10.1016/j.tsf.2023.139725.