Effect of Substrate Bias on the Crystal Structure and Morphology of Barium Strontium Niobate Films Grown by RF Cathode Sputtering

Effect of Substrate Bias on the Crystal Structure and Morphology of Barium Strontium Niobate Films Grown by RF Cathode Sputtering // INORGANIC MATERIALS. 2021. DOI: 10.1134/S0020168521040117. Q4