INFLUENCE OF THERMAL ANNEALING ON THE STRUCTURE AND OPTICAL PROPERTIES OF THIN ALUMINUM NITRIDE FILMS ON SAPPHIRE

INFLUENCE OF THERMAL ANNEALING ON THE STRUCTURE AND OPTICAL PROPERTIES OF THIN ALUMINUM NITRIDE FILMS ON SAPPHIRE // PHYSICAL AND CHEMICAL ASPECTS OF THE STUDY OF CLUSTERS NANOSTRUCTURES AND NANOMATERIALS. 2020. DOI: 10.26456/pcascnn/2020.12.591. Q