Equilibrium shape of thermomigration Al-doped channels in Si wafers
Shirokov V.B., Seredin B.M., Timoshenko P.E., Kalinchuk V.V., Popov V.P., Malibashev A.V. Equilibrium shape of thermomigration Al-doped channels in Si wafers // Materials Science and Technology. — 2025. — 6 p. — DOI: 10.1177/02670836251371444. — EDN ZHIDYN



